METHOD FOR PRODUCING AlN

PROBLEM TO BE SOLVED: To provide a manufacturing method by which AlN can be formed by suppressing formation of oxides in a melted Al material.SOLUTION: AlN 10 is generated such that: steam containing Mg which is obtained after heating Mg and nitrogen gas are reacted in an inert atmosphere to generat...

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Bibliographic Details
Main Authors UJIHARA TORU, SUZUKI KAZUNORI, TAKEUCHI YUKIHISA
Format Patent
LanguageEnglish
Japanese
Published 13.09.2018
Subjects
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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Summary:PROBLEM TO BE SOLVED: To provide a manufacturing method by which AlN can be formed by suppressing formation of oxides in a melted Al material.SOLUTION: AlN 10 is generated such that: steam containing Mg which is obtained after heating Mg and nitrogen gas are reacted in an inert atmosphere to generate MgN; an Al material 30 disposed on a base plate 20 is heated to be fused; Al in the Al material 30 and MgNare reacted. A non-oxide-based material having a melting point higher than that of Mg or Al, not combining with the fused Al in the Al material 30, not thermally decomposed in an inert atmosphere, not decomposed by a reduction effect of MgN, is used for the base plate 20. Thereby, Ois not generated by a reduction effect of MgN. Therefore, complete AlN 10 is formed without forming oxides in the fused Al material 30.SELECTED DRAWING: Figure 3 【課題】溶融したＡｌ材の中に酸化物の形成を抑制して、ＡｌＮを形成することができる製造方法を提供する。【解決手段】Ｍｇを加熱し、不活性雰囲気においてＭｇを含んだ蒸気を窒素ガスと反応させてＭｇ３Ｎ２を生成し、さらに基板２０の上に配置したＡｌ材３０を加熱して溶融させ、Ａｌ材３０のＡｌとＭｇ３Ｎ２とを反応させてＡｌＮ１０を生成する。基板２０として、Ｍｇ及びＡｌよりも高い融点を有し、溶融したＡｌ材３０のＡｌと化合せず、不活性雰囲気において熱分解せず、さらにＭｇ３Ｎ２の還元作用によって分解しない非酸化物系材料を用いる。これにより、Ｍｇ３Ｎ２による還元作用によってＯ２が発生しない。したがって、溶融したＡｌ材３０の中に酸化物を形成せずに、完全なＡｌＮ１０を形成することができる。【選択図】図３
Bibliography:Application Number: JP20170036737