OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
PROBLEM TO BE SOLVED: To provide an object holder, a lithographic apparatus, and a device manufacturing method.SOLUTION: An embodiment comprises: an object table WT to support an object W, the object table having a support body 100; an object holder 30 to hold an object; an opening 5 adjacent to an...
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Main Authors | , , , , , , , , , , , , , |
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Format | Patent |
Language | English Japanese |
Published |
30.08.2018
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Subjects | |
Online Access | Get full text |
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