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Summary:PROBLEM TO BE SOLVED: To provide a pulse power supply device which can reduce dispersion of power per pulse discharge.SOLUTION: A pulse power supply device 21 has a power storage circuit 24 having capacitors C1 and C2, a high voltage power supply 25 charging the capacitor C1 by a first charging method continuously flowing charging current, and a low voltage power supply 26 charging the capacitor C2 by a second charging method flowing the charging current at a predetermined cycle. The high voltage power supply 25 has a coil portion L12 provided between one end and the other end of the capacitor C1, the low voltage power supply 26 has a rectification circuit 64 arranged so as to flow current to one end from the other end of the capacitor C2, the power storage circuit 24 supplies power stored in the capacitors C1 and C2 as an output power so as to return from the one end of the capacitor C1 to the other end of the capacitor C2 through a center electrode 11 and an external electrode 12, and the low voltage power supply 26 charges the capacitor C2 after charging the capacitor C1 by the high voltage power supply 25.SELECTED DRAWING: Figure 4 【課題】パルス放電ごとの電力のばらつきを低減可能なパルス電源装置を提供する。【解決手段】パルス電源装置21は、コンデンサC1,C2を有する電力蓄積回路24と、充電電流を流し続ける第1充電方式でコンデンサC1を充電する高圧電源25と、所定の周期で充電電流を流す第2充電方式でコンデンサC2を充電する低圧電源26と、を備え、高圧電源25は、コンデンサC1の一端と他端との間に設けられたコイル部L12を備え、低圧電源26は、コンデンサC2の他端から一端に向けて電流を流すように配置された整流回路64を備え、電力蓄積回路24は、コンデンサC1の一端から中心電極11及び外部電極12を介してコンデンサC2の他端に戻るように、コンデンサC1,C2に蓄積された電力を出力電力として供給し、低圧電源26は、高圧電源25によるコンデンサC1の充電後に、コンデンサC2を充電する。【選択図】図4
Bibliography:Application Number: JP20170021471