CHARGED PARTICLE BEAM APPARATUS

• Main Authors: SUZUKI MASATO, TOMIMATSU SATOSHI, SATO MAKOTO
• Format: Patent
• Language: English; Japanese
• Published: 26.07.2018
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

PROBLEM TO BE SOLVED: To automatically repeat the actions of taking out a sample piece formed by ion beam processing for a sample, followed by moving the sample piece to a sample holder and setting it thereon.SOLUTION: A charged particle beam apparatus is the charged particle beam apparatus operable to automatically manufacture a sample piece from a sample. The charged particle beam apparatus comprises: a charged particle beam irradiation optical system for irradiation with a charged particle beam; a sample stage arranged so that it can be moved with a sample put thereon; sample piece move-and-setting means for holding and conveying the sample piece separated and taken out from the sample; a holder fixing base for holding a sample holder which the sample piece is moved to and set on; a conduction sensor operable to detecting electrical conduction between the sample piece move-and-setting means and a targeted object; and a computer which sets a time management mode if the conduction sensor does not detect electrical conduction between the sample piece move-and-setting means and the sample piece in connecting the sample piece move-and-setting means and the sample piece.SELECTED DRAWING: Figure 1 【課題】イオンビームによる試料の加工によって形成された試料片を摘出して試料片ホルダに移設させる動作を自動で繰返す。【解決手段】荷電粒子ビーム装置は、試料から試料片を自動的に作製する荷電粒子ビーム装置であって、荷電粒子ビームを照射する荷電粒子ビーム照射光学系と、試料を載置して移動する試料ステージと、試料から分離および摘出する試料片を保持して搬送する試料片移設手段と、試料片が移設される試料片ホルダを保持するホルダ固定台と、試料片移設手段と対象物との間の導通を検出する導通センサと、試料片移設手段と試料片を接続する際に導通センサが試料片移設手段と試料片との間の導通を検出しない場合、時間管理モードを設定するコンピュータとを備える。【選択図】図１