TRANSPORT DEVICE, OPTICAL ALIGNMENT PROCESSING APPARATUS AND OPTICAL ALIGNMENT FILM FORMATION SYSTEM

• Main Authors: YAMADA KAZUYUKI, KAWAZOE MOTOCHIKA, OZAKI KOJI
• Format: Patent
• Language: English; Japanese
• Published: 05.07.2018
• Subjects: DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

PROBLEM TO BE SOLVED: To achieve an optical alignment processing apparatus capable of curtailing an installation area and cost without deteriorating production efficiency, an optical alignment film formation system or a transport device to transport substrates and work-pieces.SOLUTION: The optical alignment processing apparatus includes a lamp unit 11 for emitting polarized light, substrate support bodies 12a, 12b each of which has a mechanism capable of individually performing a fine angle adjustment and supports each of two substrates W1, W2; a processing operation part to cause the substrate support bodies 12a, 12b to travel under the lamp unit 11 in parallel to each other; an angle adjustment mechanism 41 for changing the directions of the substrates W1, W2 roughly vertically and horizontally; and a transportation robot 2 for transporting the substrates W1, W2 passing through the angle adjustment mechanism 41 onto the substrate support bodies 12a, 12b.SELECTED DRAWING: Figure 1 【課題】 生産効率を落とすことなく、設置面積とコストを抑えることができる光配向処理装置、光配向膜形成システム、或いは、基板やワークを搬送する搬送装置を得る。【解決手段】 この発明の光配向処理装置においては、偏光光を発するランプユニット１１と、個別に角度微調整可能な機構を有し２枚の基板Ｗ１，Ｗ２を支持する基板支持体１２ａ，１２ｂと、基板支持体１２ａ，１２ｂを並列してランプユニット１１の下を走行させる処理動作部と、基板Ｗ１，Ｗ２を縦あるいは横に粗く方向を変更する角度調整機構４１と、角度調整機構４１を経た基板Ｗ１，Ｗ２を、基板支持体１２ａ，１２ｂ上まで搬送する搬送ロボット２とを備えるものである。【選択図】図１