SEMICONDUCTOR INSPECTION TOOL

PROBLEM TO BE SOLVED: To provide a semiconductor inspection tool that can have a long life.SOLUTION: Substrates 6a and 6b having conductive patterns 5a and 5b are provided on a base 4 on which a semiconductor device 1 is to be mounted. The conductive patterns 5a and 5b intersect with leads 3a and 3b...

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Main Authors KOYANAGI MOTOYOSHI, KOBAYASHI YUYA, KUBOTA MASAYUKI, TANIUCHI TOMOHITO, KITAGAWA TETSUYA, IKEDA DAISUKE, SASANO KAZUHIRO
Format Patent
LanguageEnglish
Japanese
Published 21.06.2018
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Summary:PROBLEM TO BE SOLVED: To provide a semiconductor inspection tool that can have a long life.SOLUTION: Substrates 6a and 6b having conductive patterns 5a and 5b are provided on a base 4 on which a semiconductor device 1 is to be mounted. The conductive patterns 5a and 5b intersect with leads 3a and 3b from a direction which is not horizontal to the leads 3a and 3b of the semiconductor device 1 on the base 4, and are in contact with the middle part of the leads 3a and 3b without contacting with the ends of the leads 3a and 3b.SELECTED DRAWING: Figure 3 【課題】長寿命化を図ることができる半導体検査治具を得る。【解決手段】半導体装置1を載せるベース4の上に、導電パターン5a,5bを有する基板6a,6bが設けられている。導電パターン5a,5bは、ベース4に載せられた半導体装置1のリード3a,3bに対して水平方向ではない方向からリード3a,3bに交差し、リード3a,3bの先端に接触することなくリード3a,3bの中間部分に接触する。【選択図】図3
Bibliography:Application Number: JP20160240326