HOT ZONE STRUCTURE OF HIGH FREQUENCY INDUCTION HEATING FURNACE, AND REARING METHOD OF OXIDE SINGLE CRYSTAL USING HOT ZONE STRUCTURE

• Main Author: KAJIGAYA TOMIO
• Format: Patent
• Language: English; Japanese
• Published: 21.06.2018
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; BLASTING; CHEMISTRY; CRYSTAL GROWTH; DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS,IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KINDOF FURNACE; FURNACES; FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; HEATING; KILNS; LIGHTING; MECHANICAL ENGINEERING; METALLURGY; OPEN SINTERING OR LIKE APPARATUS; OVENS; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; RETORTS; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; WEAPONS

PROBLEM TO BE SOLVED: To provide a hot zone structure capable of maintaining for a long term, a temperature environment suitable for rearing an oxide single crystal by improving a life time of a refractory used at a rearing time of the oxide single crystal.SOLUTION: A hot zone structure 2 of a high-frequency induction heating furnace has an inside heat insulation cylinder 21 as a cylindrical refractory enclosing a rearing space of an oxide single crystal on an upper part of a crucible 10, and an inner lid 23 as a cover-shaped refractory for lidding the inside heat insulation cylinder 21. The inner lid 23 is constituted of an upper stage cyclic refractory 23U and a lower stage cyclic refractory 23L.SELECTED DRAWING: Figure 2 【課題】酸化物単結晶の育成時に用いる耐火物の寿命を向上させ、酸化物単結晶の育成に適した温度環境を長期間維持できるホットゾーン構造を提供すること。【解決手段】高周波誘導加熱炉の上部ホットゾーン構造２は、坩堝１０の上にある酸化物単結晶の育成空間を囲む筒状耐火物としての内側保温筒２１と、内側保温筒２１に蓋をする蓋状耐火物としての内蓋２３とを有する。内蓋２３は、上段環状耐火物２３Ｕ及び下段環状耐火物２３Ｌで構成されている。【選択図】図２