PIEZOELECTRIC ELEMENT
PROBLEM TO BE SOLVED: To provide a piezoelectric element of a novel structure.SOLUTION: A piezoelectric element 4 includes: a first electrode 11; a first piezoelectric film 12 formed on one surface of the first electrode 11; a second electrode 14 arranged on a surface of the first piezoelectric film...
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Main Author | |
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Format | Patent |
Language | English Japanese |
Published |
14.06.2018
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a piezoelectric element of a novel structure.SOLUTION: A piezoelectric element 4 includes: a first electrode 11; a first piezoelectric film 12 formed on one surface of the first electrode 11; a second electrode 14 arranged on a surface of the first piezoelectric film 12 opposite to the first electrode 11 side; a second piezoelectric film 15 formed on a surface of the second electrode 14 opposite to the first piezoelectric film 12 side and made of a material different from that of the first piezoelectric film 12; and a third electrode 16 formed on the second piezoelectric film 15.SELECTED DRAWING: Figure 2
【課題】新規な構造の圧電素子を提供する。【解決手段】圧電素子4は、第1電極11と、第1電極の一方の表面に形成された第1圧電体膜12と、第1圧電体膜12における第1電極11側とは反対側の表面上に配置された第2電極14と、第2電極14における第1圧電体膜12側とは反対側の表面に形成され、第1圧電体膜12とは異なる材料からなる第2圧電体膜15と、第2圧電体膜15上に形成された第3電極16とを含む。【選択図】図2 |
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Bibliography: | Application Number: JP20160236773 |