PRESSURE SENSOR
PROBLEM TO BE SOLVED: To provide a pressure sensor which includes a plurality of electrodes arranged with spaces thereamong and widen a pressure measurement range in which accurate measurement is possible.SOLUTION: In a pressure sensor 1, a plurality of individual electrodes 31 are provided, facing...
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Language | English Japanese |
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31.05.2018
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Abstract | PROBLEM TO BE SOLVED: To provide a pressure sensor which includes a plurality of electrodes arranged with spaces thereamong and widen a pressure measurement range in which accurate measurement is possible.SOLUTION: In a pressure sensor 1, a plurality of individual electrodes 31 are provided, facing a common electrode 9, all over a main surface at an insulation film 7 side of a second insulator film 27. A pressure sensitive layer 33 is laminated on the plurality of individual electrodes 31, and a first individual spacer 35A and a second individual spacer 35B are arranged on a top surface of the second insulator film 27 among the plurality of individual electrodes 31 and facing the common electrode 9. The second individual spacer 35B is formed with a height higher than the first individual spacer 35A. The plurality of individual electrodes 31 include an individual electrode 31 for low pressure establishing electrical continuity to the common electrode 9 with only low pressure force acting, and an individual electrode 31 for high pressure force not establishing electrical continuity to the common electrode 9 when the low pressure force acts and establishing the electrical continuity to the common electrode 9 when the high pressure force acts.SELECTED DRAWING: Figure 2
【課題】互いに隙間を空けて配置された複数の電極を有し、正確に測定できる圧力測定範囲を広くする圧力センサを提供する。【解決手段】圧力センサ1において、複数の個別電極31は、第2絶縁膜27の絶縁フィルム7側の主面に、共通電極9に対向して敷き詰められたように設けられている。感圧層33は、複数の個別電極31の上に積層され、第1個別スペーサ35A及び第2個別スペーサ35Bは、第2絶縁膜27の上面において複数の個別電極31の間に配置され、共通電極9に対向する。第2個別スペーサ35Bは、第1個別スペーサ35Aより高く形成されている。複数の個別電極31は、低圧力が作用するだけで共通電極9と導通する低圧用の個別電極31と、低圧力が作用するときに共通電極9と導通せずに、高圧力が作用するときに共通電極9と導通する高圧用の個別電極31とを有している。【選択図】図2 |
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AbstractList | PROBLEM TO BE SOLVED: To provide a pressure sensor which includes a plurality of electrodes arranged with spaces thereamong and widen a pressure measurement range in which accurate measurement is possible.SOLUTION: In a pressure sensor 1, a plurality of individual electrodes 31 are provided, facing a common electrode 9, all over a main surface at an insulation film 7 side of a second insulator film 27. A pressure sensitive layer 33 is laminated on the plurality of individual electrodes 31, and a first individual spacer 35A and a second individual spacer 35B are arranged on a top surface of the second insulator film 27 among the plurality of individual electrodes 31 and facing the common electrode 9. The second individual spacer 35B is formed with a height higher than the first individual spacer 35A. The plurality of individual electrodes 31 include an individual electrode 31 for low pressure establishing electrical continuity to the common electrode 9 with only low pressure force acting, and an individual electrode 31 for high pressure force not establishing electrical continuity to the common electrode 9 when the low pressure force acts and establishing the electrical continuity to the common electrode 9 when the high pressure force acts.SELECTED DRAWING: Figure 2
【課題】互いに隙間を空けて配置された複数の電極を有し、正確に測定できる圧力測定範囲を広くする圧力センサを提供する。【解決手段】圧力センサ1において、複数の個別電極31は、第2絶縁膜27の絶縁フィルム7側の主面に、共通電極9に対向して敷き詰められたように設けられている。感圧層33は、複数の個別電極31の上に積層され、第1個別スペーサ35A及び第2個別スペーサ35Bは、第2絶縁膜27の上面において複数の個別電極31の間に配置され、共通電極9に対向する。第2個別スペーサ35Bは、第1個別スペーサ35Aより高く形成されている。複数の個別電極31は、低圧力が作用するだけで共通電極9と導通する低圧用の個別電極31と、低圧力が作用するときに共通電極9と導通せずに、高圧力が作用するときに共通電極9と導通する高圧用の個別電極31とを有している。【選択図】図2 |
Author | NADA HIDEAKI INOUE ATSUO |
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DocumentTitleAlternate | 圧力センサ |
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RelatedCompanies | NISSHA CO LTD |
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Snippet | PROBLEM TO BE SOLVED: To provide a pressure sensor which includes a plurality of electrodes arranged with spaces thereamong and widen a pressure measurement... |
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SubjectTerms | MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING |
Title | PRESSURE SENSOR |
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