PRESSURE SENSOR

• Main Authors: INOUE ATSUO, NADA HIDEAKI
• Format: Patent
• Language: English; Japanese
• Published: 31.05.2018
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a pressure sensor which includes a plurality of electrodes arranged with spaces thereamong and widen a pressure measurement range in which accurate measurement is possible.SOLUTION: In a pressure sensor 1, a plurality of individual electrodes 31 are provided, facing a common electrode 9, all over a main surface at an insulation film 7 side of a second insulator film 27. A pressure sensitive layer 33 is laminated on the plurality of individual electrodes 31, and a first individual spacer 35A and a second individual spacer 35B are arranged on a top surface of the second insulator film 27 among the plurality of individual electrodes 31 and facing the common electrode 9. The second individual spacer 35B is formed with a height higher than the first individual spacer 35A. The plurality of individual electrodes 31 include an individual electrode 31 for low pressure establishing electrical continuity to the common electrode 9 with only low pressure force acting, and an individual electrode 31 for high pressure force not establishing electrical continuity to the common electrode 9 when the low pressure force acts and establishing the electrical continuity to the common electrode 9 when the high pressure force acts.SELECTED DRAWING: Figure 2 【課題】互いに隙間を空けて配置された複数の電極を有し、正確に測定できる圧力測定範囲を広くする圧力センサを提供する。【解決手段】圧力センサ１において、複数の個別電極３１は、第２絶縁膜２７の絶縁フィルム７側の主面に、共通電極９に対向して敷き詰められたように設けられている。感圧層３３は、複数の個別電極３１の上に積層され、第１個別スペーサ３５Ａ及び第２個別スペーサ３５Ｂは、第２絶縁膜２７の上面において複数の個別電極３１の間に配置され、共通電極９に対向する。第２個別スペーサ３５Ｂは、第１個別スペーサ３５Ａより高く形成されている。複数の個別電極３１は、低圧力が作用するだけで共通電極９と導通する低圧用の個別電極３１と、低圧力が作用するときに共通電極９と導通せずに、高圧力が作用するときに共通電極９と導通する高圧用の個別電極３１とを有している。【選択図】図２