HEATER

• Main Authors: NAKAMURA KIYOTAKA, KAWABE YASUNORI
• Format: Patent
• Language: English; Japanese
• Published: 10.05.2018
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To provide a heater capable of efficiently heating fluid, such as He gas for blowing off foreign matters from an object to be treated.SOLUTION: A heater of the present invention includes: a first member having a resistance heating element in the inside thereof; and a second member whose heat conductivity is lower than that of the first member. A passage is provided in a portion surrounded by the first member and the second member. In such a configuration, the heater of the present disclosure can efficiently heat fluid, such as He flowing in the passage.SELECTED DRAWING: Figure 2 【課題】 被処理物から異物を吹き飛ばすためのＨｅガス等の流体を効率よく加熱することができるヒータを提供する。【解決手段】 本発明のヒータは、内部に抵抗発熱体を有する第１部材と、該第１部材よりも熱伝導率の低い第２部材とを備え、前記第１部材と前記第２部材とに囲まれた部分が流路である。このような構成であることで、本開示のヒータは、流路を流れるＨｅ等の流体を効率よく加熱することができる。【選択図】 図２