MULTILAYER PHOTOSENSITIVE FILM

• Main Authors: YUN GEUM HEE, SHIN SANG EUN, LEE HWA YOUNG, CHONG SEOL AH, KIM SANG AH, OGI SATOSHI
• Format: Patent
• Language: English; Japanese
• Published: 10.05.2018
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CHEMISTRY; CINEMATOGRAPHY; COMPOSITIONS BASED THEREON; ELECTROGRAPHY; HOLOGRAPHY; LAYERED PRODUCTS; LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM; MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS; MATERIALS THEREFOR; METALLURGY; ORGANIC MACROMOLECULAR COMPOUNDS; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; THEIR PREPARATION OR CHEMICAL WORKING-UP; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a photosensitive film which can prevent offset (offset) at the time of via formation even when containing a large amount of fillers, can form fine vias and fine pitches even in a thin film and can prevent undercut (undercut) at the time of via formation even when containing a large amount of fillers, and accordingly is strong in warpage and excellent in reliability.SOLUTION: A photosensitive film contains a first layer and a second layer formed on an upper surface of the first layer, where the first layer and the second layer are formed of a photocurable resin composition containing a photoinitiator (PI), a photoabsorber (PA) and an inorganic filler, a content of the photoinitiator of the first layer is 0.2-0.7 pts.wt. based on the whole weight of the photocurable resin composition, a content of the photoinitiator of the second layer is 0.1-0.3 pts.wt. based on the whole weight of the photocurable resin composition, and the content of the photoinitiator of the first layer is larger than the content of the photoinitiator of the second layer.SELECTED DRAWING: Figure 1 【課題】多量のフィラーを含んでも、ビア形成時にオフセット（ｏｆｆｓｅｔ）を防止することができ、薄膜でも微細ビア及び微細ピッチの形成が可能であり、多量のフィラーを含んでもビア形成時にアンダーカット（ｕｎｄｅｒｃｕｔ）を防止することができるので、反りに強く信頼性に優れた感光性フィルムを提供する。【解決手段】第１層と、第１層の上面に形成される第２層とを含み、上記第１層及び第２層は、光開始剤（ＰＩ）、光吸収剤（ＰＡ）及び無機充填材を含む光硬化性樹脂組成物で形成され、上記第１層の上記光開始剤の含量は、光硬化性樹脂組成物の全体重量を基準にして０．２〜０．７重量部で含まれ、上記第２層の上記光開始剤の含量は、光硬化性樹脂組成物の全体重量を基準にして０．１〜０．３重量部で含まれ、上記第１層の光開始剤の含量が第２層の光開始剤の含量よりも大きいことを特徴とする。【選択図】図１