PLASMA LIGHT SOURCE

• Main Author: SODEKODA TATSUYA
• Format: Patent
• Language: English; Japanese
• Published: 26.04.2018
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

PROBLEM TO BE SOLVED: To extend utilization time for providing stable strength of an extreme-ultraviolet light in an opposed type plasma light source.SOLUTION: A plasma light source has a center electrode 12 and a plurality of external electrodes 14, which extend on a same axis line, a pair of coaxial electrodes 10, 10 arranged with sandwiching a symmetry plane and opposing each other, a medium holding part for holding a medium of plasma supplied between the center electrode and external electrodes, a voltage application device for applying discharge voltage too each coaxial electrode 10, a laser device for irradiating a laser beam for conducting ablation of the medium to the medium holding part and an exchange part 20 for changing the center electrode 12 and a preliminary electrode 12s of the center electrode 12 in a vacuum tank in which the pair of coaxial electrode 10, 10 are arranged.SELECTED DRAWING: Figure 4 【課題】対向型プラズマフォーカス方式のプラズマ光源において、極端紫外光の安定的な強度が得られる稼働時間の長期化を図ること。【解決手段】プラズマ光源は、単一の軸線上に延びる中心電極１２および複数の外部電極１４を有し、対称面を挟んで互いに対向配置される一対の同軸状電極１０、１０と、中心電極と外部電極との間に供給されるプラズマの媒体を保持する媒体保持部と、各同軸状電極１０に対して放電電圧を印加する電圧印加装置と、媒体のアブレーションを行うためのレーザー光を媒体保持部に照射するレーザー装置と、一対の同軸状電極１０、１０が設置される真空槽内で中心電極１２と中心電極１２の予備電極１２ｓとを交換する交換部２０とを備える。【選択図】図４