ANODE UNIT AND PLATING DEVICE EQUIPPED WITH THE ANODE UNIT
PROBLEM TO BE SOLVED: To provide an anode unit that can form a metal film with a uniform thickness on a substrate by preventing an extreme drop in current density on the anode.SOLUTION: An anode unit 11 comprises: an anode 2 immersed in plating solution; a base member 14 for holding the anode 2; a f...
Saved in:
Main Authors | , , , |
---|---|
Format | Patent |
Language | English Japanese |
Published |
26.04.2018
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!