ANODE UNIT AND PLATING DEVICE EQUIPPED WITH THE ANODE UNIT

PROBLEM TO BE SOLVED: To provide an anode unit that can form a metal film with a uniform thickness on a substrate by preventing an extreme drop in current density on the anode.SOLUTION: An anode unit 11 comprises: an anode 2 immersed in plating solution; a base member 14 for holding the anode 2; a f...

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Bibliographic Details
Main Authors SAITO NOBUTOSHI, YASUDA SHINGO, SHIMOYAMA TADASHI, KURIYAMA FUMIO
Format Patent
LanguageEnglish
Japanese
Published 26.04.2018
Subjects
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