CATALYST BODY UNIT USED FOR CATALYST CVD METHOD, FILM DEPOSITION APPARATUS INCLUDING THE SAME AND CATALYST BODY CONNECTION METHOD

• Main Authors: KINOSHITA SATORU, TABUCHI HIROYASU
• Format: Patent
• Language: English; Japanese
• Published: 12.04.2018
• Subjects: CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; THEIR RELEVANT APPARATUS; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a catalyst body unit, etc., capable of efficiently attaching and detaching a catalyst body to electrodes.SOLUTION: In a catalyst body unit 3 used for a catalyst CVD method and including at least one catalyst body 11 formed linear and a pair of electrodes 15A and 15B...