CATALYST BODY UNIT USED FOR CATALYST CVD METHOD, FILM DEPOSITION APPARATUS INCLUDING THE SAME AND CATALYST BODY CONNECTION METHOD

• Main Authors: KINOSHITA SATORU, TABUCHI HIROYASU
• Format: Patent
• Language: English; Japanese
• Published: 12.04.2018
• Subjects: CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; THEIR RELEVANT APPARATUS; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a catalyst body unit, etc., capable of efficiently attaching and detaching a catalyst body to electrodes.SOLUTION: In a catalyst body unit 3 used for a catalyst CVD method and including at least one catalyst body 11 formed linear and a pair of electrodes 15A and 15B for energizing the catalyst body 11, a connection tool 20 for every electrode is interposed between end portions 11a and 11b of the catalyst body 11 and the pair of electrodes 15A and 15B, respectively, and the end portions 11a and 11b and the electrodes 15A and 15B of the catalyst body 11 are electrically connected, and the catalyst body 11 is detachably connected to the electrodes 15A and 15B through the connection tool 20.SELECTED DRAWING: Figure 2 【課題】触媒体を電極に対して効率よく着脱することが可能な触媒体ユニット等の提供。【解決手段】触媒ＣＶＤ法に用いられ、線状に形成された少なくとも１本の触媒体１１と、触媒体１１に通電するための一対の電極１５Ａ、１５Ｂとを備えたる触媒体ユニット３において、触媒体１１の端部１１ａ、１１ｂと一対の電極１５Ａ、１５Ｂのそれぞれとの間に電極ごとの連結具２０を介在させ、触媒体１１の端部１１ａ、１１ｂと電極１５Ａ、１５Ｂとが電気的に接続されるようにして触媒体１１を連結具２０を介して電極１５Ａ、１５Ｂに着脱自在に連結する触媒体ユニット３。【選択図】図２