MOVING DEVICE
PROBLEM TO BE SOLVED: To provide a technology capable of realizing a high positioning accuracy using a pair of magnets upon moving an object existing opposite with respect to a partition wall.SOLUTION: A moving device 10 for moving a stage 105 through a partition wall (e.g. a bottom wall of a chambe...
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Main Authors | , |
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Format | Patent |
Language | English Japanese |
Published |
12.04.2018
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Subjects | |
Online Access | Get full text |
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