MOVING DEVICE

PROBLEM TO BE SOLVED: To provide a technology capable of realizing a high positioning accuracy using a pair of magnets upon moving an object existing opposite with respect to a partition wall.SOLUTION: A moving device 10 for moving a stage 105 through a partition wall (e.g. a bottom wall of a chambe...

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Bibliographic Details
Main Authors HOSOI KOSUKE, FURUTA MASATOMO
Format Patent
LanguageEnglish
Japanese
Published 12.04.2018
Subjects
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