MOVING DEVICE

• Main Authors: HOSOI KOSUKE, FURUTA MASATOMO
• Format: Patent
• Language: English; Japanese
• Published: 12.04.2018
• Subjects: CONVEYING; HANDLING THIN OR FILAMENTARY MATERIAL; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; SHOP CONVEYOR SYSTEMS; STORING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a technology capable of realizing a high positioning accuracy using a pair of magnets upon moving an object existing opposite with respect to a partition wall.SOLUTION: A moving device 10 for moving a stage 105 through a partition wall (e.g. a bottom wall of a chamber 101) comprises a first magnet 1 that is arranged fixedly to a stage 105 and closer to one side of the partition wall, a second magnet 2 that is arranged opposite to the first magnet 1 and closer to the other side of the partition wall such that magnetic poles different in polarity face to each other, a third magnet 3 that has a magnetic force equal to or smaller than a magnetic force of the second magnet 2 and is arranged reverse in polarity direction to the second magnet 2 in a location provided closer to the other side with a predetermined spacing from the second magnet 2 with respect to a moving direction of the stage 105, and a drive mechanism that moves the second magnet 2 and the third magnet 3 with their mutual positional relationship remained fixed.SELECTED DRAWING: Figure 1 【課題】一対の磁石を用いて、隔壁を隔てた向こう側にある対象物を移動させるにあたって、高い位置決め精度を実現できる技術を提供する。【解決手段】隔壁（例えば、チャンバー１０１の底壁）を介してステージ１０５を移動させるための移動装置１０であって、隔壁の一方の側に、ステージ１０５に対して固定するように配置された第１磁石１と、隔壁の他方の側に、異なる極性の磁極が向かい合うように第１磁石１と対向配置された第２磁石２と、当該他方の側であって、ステージ１０５の移動方向について第２磁石２から所定の間隔を設けた位置に、第２磁石２と極性の向きを逆にして配置された、第２磁石２の磁力と同等以下の磁力を有する第３磁石３と、第２磁石２と第３磁石３とを、互いの位置関係を固定したまま移動させる駆動機構と、を備える。【選択図】図１