ILLUMINATION DEVICE, EXPOSURE DEVICE AND PRODUCTION METHOD OF ARTICLE

• Main Author: TERASHI TAKAAKI
• Format: Patent
• Language: English; Japanese
• Published: 22.03.2018
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

PROBLEM TO BE SOLVED: To provide an illumination device advantageous for illuminating an arc-like region in a surface to be illuminated.SOLUTION: An illumination device includes an optical system that forms a rectangular illumination region that has a longer direction along a first direction and a shorter direction along a second direction orthogonal to the first direction on a surface optically conjugate with a surface to be illuminated, and includes a first integrator and a second integrator that form the illumination region that covers an arc-like opening, in which the first integrator forms a first illumination region that has a first length in the first direction and a second length in the second direction, the second integrator forms a second illumination region that has a third length shorter than the first length in the first direction and a fourth length shorter than the second length in the second direction such that a side on a convex side of the arc-like opening among sides along the first direction of the first illumination region and a side on a convex side of the arc-like opening among sides along the first direction of the second illumination region may coincide with each other.SELECTED DRAWING: Figure 5 【課題】被照明面において円弧状の領域を照明するのに有利な照明装置を提供する。【解決手段】被照明面と光学的に共役な面に、第１方向に沿って長手方向を有し、前記第１方向に直交する第２方向に沿って短手方向を有する矩形状の照明領域を形成する光学系を有し、円弧状の開口をカバーする前記照明領域を形成する第１インテグレータ及び第２インテグレータと、を含み、前記第１インテグレータは、前記第１方向に第１長さを有し、前記第２方向に第２長さを有する第１照明領域を形成し、前記第２インテグレータは、前記第１方向に前記第１長さより短い第３長さを有し、前記第２方向に前記第２長さより短い第４長さを有する第２照明領域を、前記第１照明領域の前記第１方向に沿った辺のうちの前記円弧状の開口の凸側の辺と前記第２照明領域の前記第１方向に沿った辺のうちの前記円弧状の開口の凸側の辺とが一致するように形成する。【選択図】図５