METHOD FOR MANUFACTURING PIEZOELECTRIC DEVICE

• Main Authors: YAZAKI SHIRO, FUKUZAWA YUMA
• Format: Patent
• Language: English; Japanese
• Published: 15.03.2018
• Subjects: CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; CORRECTION OF TYPOGRAPHICAL ERRORS; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; PERFORMING OPERATIONS; PRINTING; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS

PROBLEM TO BE SOLVED: To suppress characteristic deterioration of a piezoelectric layer in a manufacturing process.SOLUTION: A method for manufacturing a piezoelectric device includes the steps of: forming a first electrode; forming a piezoelectric layer overlapping with the first electrode; forming a first conductor overlapping with the piezoelectric layer and being electrically conductive to the first electrode; forming a second conductor overlapping with the first conductor; and forming a second electrode overlapping with the piezoelectric layer and being not electrically conductive to the first electrode by patterning the first conductor after execution of the step of forming the second conductor.SELECTED DRAWING: Figure 5 【課題】製造工程における圧電体層の特性劣化を抑制する。【解決手段】第１電極を形成する工程と、前記第１電極に重なる圧電体層を形成する工程と、前記圧電体層に重なり、前記第１電極に導通する第１導電体を形成する工程と、前記第１導電体に重なる第２導電体を形成する工程と、前記第２導電体を形成する工程の実行後に、前記第１導電体をパターニングすることで、前記圧電体層に重なり、前記第１電極に導通しない第２電極を形成する工程とを含む圧電デバイスの製造方法。【選択図】図５