SEMICONDUCTOR MANUFACTURING APPARATUS

• Main Authors: UDA YUKIO, INOUE KAZUYA, RYU HIROSHI, KANADA KAZUNORI
• Format: Patent
• Language: English; Japanese
• Published: 08.03.2018
• Subjects: BLASTING; DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS,IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KINDOF FURNACE; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FURNACES; HEATING; KILNS; LIGHTING; MECHANICAL ENGINEERING; OVENS; RETORTS; WEAPONS

PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing apparatus capable of extending service life of a heater at a low cost.SOLUTION: A semiconductor substrate is processed in a reactor. A heater is arranged around the reactor and heats the reactor. The heater includes: a spiral-shaped resistance heating element 3; an electrode 4 for supplying electric power to the resistance heating element 3; and a heat insulation material 5 surrounding the resistance heating element. The electrode 4 is fixed to the resistance heating element 3 in the inside of the heat insulation material 5, pulled out to the outside of the heat insulation material 5 while passing through an opening provided on the side surface of the heat insulation material 5, and is not fixed to the heat insulation material 5.SELECTED DRAWING: Figure 3 【課題】低コストでヒーターの寿命を延ばすことができる半導体製造装置を提供する。【解決手段】反応炉は半導体基板を処理する。ヒーターは反応炉の周りに配置されて反応炉を加熱する。ヒーターは、螺旋状の抵抗発熱体３と、抵抗発熱体３に電力を供給する電極４と、抵抗発熱体を囲む断熱材５とを有する。電極４は、断熱材５の内側において抵抗発熱体３に固定され、断熱材５の側面に設けられた開口を通って断熱材５の外側に引き出され、断熱材５に固定されていない。【選択図】図３