IMAGING DEVICE AND METHOD FOR MANUFACTURING THE SAME, AND CAMERA

• Main Authors: SUZUKI SHO, KUMANO HIDEOMI, FUKUDA KOICHI, TAKAMI KOKI, OKAMOTO KOHEI, TEZUKA TOMOYUKI
• Format: Patent
• Language: English; Japanese
• Published: 22.02.2018
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PICTORIAL COMMUNICATION, e.g. TELEVISION; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide a technology advantageous for separating a plurality of luminous fluxes in an imaging device.SOLUTION: At least part of a plurality of pixels of an imaging device includes a plurality of photoelectric conversion parts arranged on a semiconductor substrate and an optical waveguide provided for the plurality of photoelectric conversion parts. The optical waveguide includes a main waveguide surrounded by an insulating film so that light made incident on the plurality of photoelectric conversion parts passes therethrough, and a plurality of sub waveguides arranged between the main waveguide and the semiconductor substrate and through which the rays of light respectively made incident on the plurality of photoelectric conversion parts individually pass. The plurality of sub waveguides are separated from each other by a separation part.SELECTED DRAWING: Figure 1 【課題】撮像装置において、複数の光束を分離するために有利な技術を提供する。【解決手段】撮像装置の複数の画素の少なくとも一部の画素は、半導体基板に配置された複数の光電変換部と、前記複数の光電変換部に対して設けられた光導波路とを有し、前記光導波路は、前記複数の光電変換部に入射する光が通るように絶縁膜で囲まれた主導波路と、前記主導波路と前記半導体基板との間に配置され、前記複数の光電変換部にそれぞれ入射する光が個別に通る複数の副導波路とを含み、前記複数の副導波路は分離部によって相互に分離されている。【選択図】図１