METHOD OF INSPECTING SHOWER PLATE OF PLASMA PROCESSING APPARATUS

• Main Authors: AMIKURA NORIHIKO, MIYOSHI RISAKO
• Format: Patent
• Language: English; Japanese
• Published: 22.02.2018
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To provide a method of inspecting the shower plate of a plasma processing apparatus.SOLUTION: In a plasma processing apparatus to be inspected by the inventive method, a gas discharge section has a shower plate. Multiple gas discharge holes are formed in the shower plate. This method includes (i) a step of setting the flow rate of gas to be outputted from a first flow controller, and (ii) a step of acquiring a measured value indicating the pressure in the flow path in a second flow controller by using the pressure gage in the second flow controller, in a state where gas outputted from the first flow controller with a set flow rate is supplied to a gas discharge section, and branched between the first flow controller and gas discharge section before being supplied to a flow path in a pressure control type second flow controller.SELECTED DRAWING: Figure 1 【課題】プラズマ処理装置のシャワープレートを検査する方法を提供する。【解決手段】一態様に係る方法において検査されるプラズマ処理装置では、ガス吐出部がシャワープレートを有する。シャワープレートには、複数のガス吐出孔が形成されている。この方法は、（ｉ）第１の流量制御器から出力されるガスの流量を設定する工程と、（ｉｉ）設定された流量で第１の流量制御器から出力されたガスがガス吐出部に供給され、且つ、第１の流量制御器とガス吐出部との間で分岐されて圧力制御式の第２の流量制御器の内部の流路に供給されている状態で、該第２の流量制御器の圧力計を用いて、該第２の流量制御器の内部の流路における圧力を示す測定値を取得する工程と、を含む。【選択図】図１