METHOD OF MANUFACTURING CERAMIC MULTILAYER SUBSTRATE

PROBLEM TO BE SOLVED: To provide a method of manufacturing a ceramic multilayer substrate having high degree of freedom of material design using a ceramic green sheet for contraction suppression.SOLUTION: A manufacturing method includes: a step of preparing a composite laminate 1 constituted of an u...

Full description

Saved in:
Bibliographic Details
Main Author ASAI RYOTA
Format Patent
LanguageEnglish
Japanese
Published 15.02.2018
Subjects
ARTIFICIAL STONE
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
CEMENTS
CERAMICS
CHEMISTRY
COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS
CONCRETE
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
LIME, MAGNESIA
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
METALLURGY
PRINTED CIRCUITS
REFRACTORIES
SLAG
TREATMENT OF NATURAL STONE
Online AccessGet full text

Cover

More Information
Summary:PROBLEM TO BE SOLVED: To provide a method of manufacturing a ceramic multilayer substrate having high degree of freedom of material design using a ceramic green sheet for contraction suppression.SOLUTION: A manufacturing method includes: a step of preparing a composite laminate 1 constituted of an unbaked ceramic laminate in which a plurality of ceramic green sheet 11 for a substrate are laminated and a ceramic green sheet 20 for contraction suppression, which is disposed on at least one principal surface of the unbaked ceramic laminate 10 and is not substantially sintered at such a temperature that the unbaked ceramic laminate 10 is sintered; a baking step of performing baking at such a temperature that the unbaked ceramic laminate 10 is sintered; a first removal step of removing a non-sintered layer without reacting with a glass component while leaving a reaction layer 21 formed on a boundary with the ceramic laminate 10 by spraying solid matter, liquid matter, and compressed gas to the above described ceramic green sheet 20 for contraction suppression on the principal surface of the composite laminate 1; and a second removal step of removing the reaction layer 21.SELECTED DRAWING: Figure 1 【課題】収縮抑制用セラミックグリーンシートを用いて材料設計の自由度が高いセラミック多層基板の製造方法を提供する。【解決手段】複数の基板用セラミックグリーンシート１１が積層された未焼成のセラミック積層体と、未焼成のセラミック積層体１０の少なくとも一方主面に配置され、未焼成のセラミック積層体１０が焼結する温度では実質的に焼結しない収縮抑制用セラミックグリーンシート２０と、からなる複合積層体１を準備する工程と、未焼成のセラミック積層体１０が焼結する温度で焼成する焼成工程と、複合積層体１の主面上の上記収縮抑制用セラミックグリーンシート２０に、固形物、液状物及び圧縮ガスを吹き付けることにより、セラミック積層体１０との界面に形成された反応層２１を残すとともに、ガラス成分と反応していない非焼結層を除去する第１除去工程と、反応層２１を除去する第２除去工程と、を備える。【選択図】図１
Bibliography:Application Number: JP20160156727