ARC DISCHARGE GENERATOR

• Main Authors: SATO TAKAYASU, TSUBOI HIROKI, NAKADA HIROMICHI, SATOU YOUJI, TACHIBANA KAZUTAKA
• Format: Patent
• Language: English; Japanese
• Published: 08.02.2018
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To provide an arc discharge generator capable of decreasing an exchange frequency of an evaporation source.SOLUTION: An arc discharge generator generates an arc discharge from a discharge surface 22 of an evaporation source 21 by contacting a striker tip 41 to the evaporation s...