ARC DISCHARGE GENERATOR

• Main Authors: SATO TAKAYASU, TSUBOI HIROKI, NAKADA HIROMICHI, SATOU YOUJI, TACHIBANA KAZUTAKA
• Format: Patent
• Language: English; Japanese
• Published: 08.02.2018
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To provide an arc discharge generator capable of decreasing an exchange frequency of an evaporation source.SOLUTION: An arc discharge generator generates an arc discharge from a discharge surface 22 of an evaporation source 21 by contacting a striker tip 41 to the evaporation source 21 and separating the stricker tip 41 from the evaporation source 21. The arc discharge generator includes a drive mechanism for moving the stricker tip 41 so as the stricker tip 41 to contact an edge surface 25 which connects a rear surface 23 and the discharge surface 22, the rear surface 23 facing the discharge surface 22 in the evaporation source 21. A length L1 of the stricker tip 41 in a moving direction D1 in the evaporation source 21 is larger than a length L2 between the discharge surface 22 and the rear surface 23 in the evaporation source 21.SELECTED DRAWING: Figure 4 【課題】蒸発源の交換頻度を少なくすることができるアーク放電発生装置を提供する。【解決手段】蒸発源２１にストライカチップ４１を接触させてから、該ストライカチップ４１を蒸発源２１から離間させることによって、蒸発源２１の放電面２２からアーク放電を発生させるアーク放電発生装置であって、アーク放電発生装置は、蒸発源２１における放電面２２に対する裏面２３と放電面２２とを接続する端面２５にストライカチップ４１を接触させるように該ストライカチップ４１を移動させる駆動機構を備えている。そして、蒸発源２１におけるストライカチップ４１の移動方向Ｄ１の寸法Ｌ１が、蒸発源２１における放電面２２と裏面２３との間の寸法Ｌ２よりも大きい。【選択図】図４