INK-JET PRINTING HEAD AND METHOD FOR MANUFACTURING THE SAME

PROBLEM TO BE SOLVED: To provide an ink-jet printing head having no step between an actuator substrate and a nozzle substrate.SOLUTION: An ink-jet printing head 1 includes: an actuator substrate 2 having an ink flow channel 5 including a pressure chamber 7; a movable film formation layer 10 includin...

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Bibliographic Details
Main Authors ASHIKAGA KINYA, MATSUO NOBUFUMI
Format Patent
LanguageEnglish
Japanese
Published 08.02.2018
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Summary:PROBLEM TO BE SOLVED: To provide an ink-jet printing head having no step between an actuator substrate and a nozzle substrate.SOLUTION: An ink-jet printing head 1 includes: an actuator substrate 2 having an ink flow channel 5 including a pressure chamber 7; a movable film formation layer 10 including a movable film 10A which is arranged on the pressure chamber 7 and partitions a top surface portion of the pressure chamber 7; a piezoelectric element 9 formed on the movable film 10A; and a nozzle substrate 3 which is bonded to a second surface 2b in an opposite side to a first surface 2a being a surface on the side of the movable film 10 of the actuator substrate 2 by an adhesive, partitions a bottom surface portion of the pressure chamber 7, and has a nozzle hole 20 communicating with the pressure chamber 7. A side surface of the actuator substrate 2 and a side surface of the nozzle substrate 3 are flush with each other in all directions in plan view when viewed from a normal direction of the movable film 10A.SELECTED DRAWING: Figure 2 【課題】アクチュエータ基板とノズル基板との間に段差のないインクジェットプリントヘッドを提供する。【解決手段】インクジェットプリントヘッド1は、圧力室7を含むインク流路5を有するアクチュエータ基板2と、圧力室7上に配置されかつ圧力室7の天面部を区画する可動膜10Aを含む可動膜形成層10と、可動膜10A上に形成された圧電素子9と、アクチュエータ基板2の可動膜10A側の表面である第1表面2aとは反対側の第2表面2bに接着剤によって接合され、圧力室7の底面部を区画し、圧力室7に連通するノズル孔20を有するノズル基板3とを含む。アクチュエータ基板2の側面とノズル基板3の側面とが、可動膜10Aの法線方向から見た平面視において全方位で面一である。【選択図】図2
Bibliography:Application Number: JP20160154903