ORGANIC THIN FILM MANUFACTURING DEVICE AND ORGANIC THIN FILM MANUFACTURING METHOD

• Main Author: HIRONAKA KATSUYUKI
• Format: Patent
• Language: English; Japanese
• Published: 25.01.2018
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To provide a manufacturing device and a manufacturing method of an organic thin film capable of depositing an organic thin film inexpensively in a uniform film thickness on a large-area substrate.SOLUTION: In an organic thin film manufacturing device, a lattice-shaped or stripe-shaped groove partitioned by a bulkhead for storing a raw material obtained by dissolving an organic EL material into an organic solvent is formed on a large-area substrate, and a heating element for evaporating the organic EL material is formed on a bottom part of the groove.SELECTED DRAWING: Figure 1 【課題】有機薄膜を大面積基板に均一な膜厚で、低コストに成膜することを可能にする有機薄膜の製造装置と製造方法を提供すること。【解決手段】有機薄膜製造装置は、大面積基板の上に有機ＥＬ材料を有機溶媒に溶解した原料を貯蔵するための隔壁で仕切られた格子状あるいはストライプ状の溝が形成されていて、その溝の底部に有機ＥＬ材料を蒸発するための発熱体が形成されている。【選択図】図１