ORGANIC THIN FILM MANUFACTURING DEVICE AND ORGANIC THIN FILM MANUFACTURING METHOD
PROBLEM TO BE SOLVED: To provide a manufacturing device and a manufacturing method of an organic thin film capable of depositing an organic thin film inexpensively in a uniform film thickness on a large-area substrate.SOLUTION: In an organic thin film manufacturing device, a lattice-shaped or stripe...
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Main Author | |
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Format | Patent |
Language | English Japanese |
Published |
25.01.2018
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a manufacturing device and a manufacturing method of an organic thin film capable of depositing an organic thin film inexpensively in a uniform film thickness on a large-area substrate.SOLUTION: In an organic thin film manufacturing device, a lattice-shaped or stripe-shaped groove partitioned by a bulkhead for storing a raw material obtained by dissolving an organic EL material into an organic solvent is formed on a large-area substrate, and a heating element for evaporating the organic EL material is formed on a bottom part of the groove.SELECTED DRAWING: Figure 1
【課題】有機薄膜を大面積基板に均一な膜厚で、低コストに成膜することを可能にする有機薄膜の製造装置と製造方法を提供すること。【解決手段】有機薄膜製造装置は、大面積基板の上に有機EL材料を有機溶媒に溶解した原料を貯蔵するための隔壁で仕切られた格子状あるいはストライプ状の溝が形成されていて、その溝の底部に有機EL材料を蒸発するための発熱体が形成されている。【選択図】図1 |
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Bibliography: | Application Number: JP20160153224 |