METHOD OF MANUFACTURING CARRIER FOR SINGLE MOLECULE DETECTION

• Main Authors: YI GUN-GYONG, FAN SHOUSHAN, JIN YUAN-HAO
• Format: Patent
• Language: English; Japanese
• Published: 11.01.2018
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MEASURING; NANOTECHNOLOGY; PERFORMING OPERATIONS; PHYSICS; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; TESTING; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a method of manufacturing a carrier for single molecule detection.SOLUTION: A method of the present invention for manufacturing a carrier for single molecule detection includes; a first step of providing a substrate; a second step of providing a carbon nanotube composite structure having a plurality of first holes; a third step of setting the carbon nanotube composite structure on a first surface of the substrate, and partially exposing the first surface; a fourth step of etching the first surface using the carbon nanotube composite structure as a mask to form a patterned protrusion on the first surface, the patterned protrusion comprising a plurality of strip-shaped protrusions intersecting with each other; and a fifth step of forming a metal layer on a surface of the patterned protrusion.SELECTED DRAWING: Figure 5 【課題】本発明は、単一分子検出用のキャリアの製造方法に関する。【解決手段】本発明の単一分子検出用のキャリアの製造方法は、基板を提供する第一ステップと、複数の第一孔を有するカーボンナノチューブ複合構造体を提供する第二ステップと、基板の第一表面にカーボンナノチューブ複合構造体を設置し、第一表面の一部を露出させる第三ステップと、カーボンナノチューブ複合構造体をマスクとして、第一表面をエッチングして、第一表面にパターン化突起を形成し、パターン化突起は互いに交差している複数の帯状突起を含む第四ステップと、パターン化突起の表面に金属層を形成する第五ステップと、を含む。【選択図】図５