WATER-SOLUBLE COMPOSITION, SEMICONDUCTOR PRODUCED THEREWITH, AND METHOD FOR PRODUCING DEVICE

• Main Authors: MIYAZAWA TAKASHI, TOMA YUKI
• Format: Patent
• Language: English; Japanese
• Published: 11.01.2018
• Subjects: CHEMISTRY; COMPOSITIONS BASED THEREON; MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS; METALLURGY; ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP

PROBLEM TO BE SOLVED: To provide a water-soluble composition having high water solubility and excellent plasma etching resistance.SOLUTION: A composition contains a first compound, and a photoacid generator. The first compound has a plurality of first units. The plurality of first units each compris...