IMAGE ACQUISITION DEVICE AND FILM THICKNESS MEASUREMENT METHOD

• Main Author: ISHI TSUTOMU
• Format: Patent
• Language: English; Japanese
• Published: 30.11.2017
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide an image acquisition device which is of a simple construction, less affected by a variation in the refractive index of a substrate and small in measurement error, and a film thickness measurement method.SOLUTION: An image acquisition device of the present invention performs film thickness measurement utilizing optical interference, the image acquisition device comprising: a light source for radiating a measurement light; a sample stage on which a sample having a measurement object arranged on a substrate is placed; a low reflection body arranged between the bottom of the substrate and the sample stage, for reducing the measurement light reflected in the direction of the measurement object from the bottom of the substrate and the sample stage; a camera for receiving the measurement light reflected by the measurement object and converting the same to data; and control means for measuring the film thickness of the measurement object on the basis of the data acquired by the camera.SELECTED DRAWING: Figure 1 【課題】 簡易な構成で、基材の屈折率ばらつきの影響が小さく、計測誤差が小さな画像取得装置及び膜厚測定方法を提供する。【解決手段】 本発明の画像取得装置は、光学干渉を利用した膜厚測定を行う画像取得装置であって、測定光を放射する光源と、基材上に被測定物が配された試料を搭載する試料ステージと、基材の底面と前記試料ステージとの間に配され、基材の底面及び試料ステージから被測定物の方向に反射される測定光を低減する低反射体と、被測定物で反射された測定光を受光してデータに変換するカメラと、カメラで取得されたデータに基づいて被測定物の膜厚を測定する制御手段と、を備える。【選択図】 図１