STAGE DEVICE

• Main Author: NAKAJIMA RYUTA
• Format: Patent
• Language: English; Japanese
• Published: 24.11.2017
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; MATERIALS THEREFOR; METAL-WORKING NOT OTHERWISE PROVIDED FOR; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a technique capable of achieving high accuracy of a stage device.SOLUTION: A stage device includes: a first moving body 12; a first X-axis drive unit 16 and a second X-axis drive unit 18 for driving the first moving body 12 in an X-axis direction; and a second moving body 14 guiding the movement of the first moving body 12 in the X-axis direction and configured to be movable in a Y-axis direction. The first X-axis drive unit 16 and the second X-axis drive unit 18 are supported not through the second moving body 14.SELECTED DRAWING: Figure 1 【課題】ステージ装置の高精度化を実現できる技術を提供する。【解決手段】第１移動体１２と、第１移動体１２をＸ軸方向に駆動するための第１Ｘ軸駆動部１６、第２Ｘ軸駆動部１８と、第１移動体１２のＸ軸方向の移動を案内し、Ｙ軸方向に移動可能に構成された第２移動体１４と、を備える。第１Ｘ軸駆動部１６、第２Ｘ軸駆動部１８は、第２移動体１４を介さずに支持される。【選択図】図１