STAGE DEVICE
PROBLEM TO BE SOLVED: To provide a technique capable of achieving high accuracy of a stage device.SOLUTION: A stage device includes: a first moving body 12; a first X-axis drive unit 16 and a second X-axis drive unit 18 for driving the first moving body 12 in an X-axis direction; and a second moving...
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Main Author | |
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Format | Patent |
Language | English Japanese |
Published |
24.11.2017
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a technique capable of achieving high accuracy of a stage device.SOLUTION: A stage device includes: a first moving body 12; a first X-axis drive unit 16 and a second X-axis drive unit 18 for driving the first moving body 12 in an X-axis direction; and a second moving body 14 guiding the movement of the first moving body 12 in the X-axis direction and configured to be movable in a Y-axis direction. The first X-axis drive unit 16 and the second X-axis drive unit 18 are supported not through the second moving body 14.SELECTED DRAWING: Figure 1
【課題】ステージ装置の高精度化を実現できる技術を提供する。【解決手段】第1移動体12と、第1移動体12をX軸方向に駆動するための第1X軸駆動部16、第2X軸駆動部18と、第1移動体12のX軸方向の移動を案内し、Y軸方向に移動可能に構成された第2移動体14と、を備える。第1X軸駆動部16、第2X軸駆動部18は、第2移動体14を介さずに支持される。【選択図】図1 |
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Bibliography: | Application Number: JP20160097770 |