ION MANIPULATION DEVICE FOR GUIDING OR CONFINING ION IN ION PROCESSING APPARATUS

• Main Authors: KATTHEW GILL, ROGER GILES
• Format: Patent
• Language: English; Japanese
• Published: 24.11.2017
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide an ion manipulation device for guiding or confining ions in an ion processing apparatus.SOLUTION: An ion manipulation device includes: a first circuit board 1a, in which at least one first electrode 5a for manipulating a path of ions is mounted on a mounting surface of the first circuit board; a second circuit board 1b, in which at least one second electrode 5b for manipulating the path of ions is mounted on a mounting surface of the second circuit board; and at least one bridging electrode 3 for manipulating the path of ions, which is mounted to both the mounting surface of the first circuit board 1a and the mounting surface of the second circuit board 1b, and which is configured to hold the first circuit board 1a and the second circuit board 1b apart from each other in a fixed spatial relationship where the mounting surface of the second circuit board 1b faces toward the mounting surface of the first circuit board 1a.SELECTED DRAWING: Figure 1 【課題】イオン処理装置においてイオンを案内する又は閉じ込めるためのイオン操作装置を提供する。【解決手段】イオン操作装置は、イオンの行路を操作するための少なくとも１つの第１の電極５ａがその実装面に取り付けられた第１の回路基板１ａと、イオンの行路を操作するための少なくとも１つの第２の電極５ｂがその実装面に取り付けられた第２の回路基板１ｂと、イオンの行路を操作するための少なくとも１つのブリッジ電極３であって、第１の回路基板１ａの実装面と第２の回路基板１ｂの実装面の両方に取り付けられ、且つ、第２の回路基板１ｂの実装面と第１の回路基板１ａの実装面が互いに対向する固定的な空間関係となるように第１の回路基板１ａと第２の回路基板１ｂを相互に離間させて保持するように構成された、少なくとも１つのブリッジ電極３とを有する。【選択図】図１