X-RAY INSPECTION DEVICE

• Main Authors: MOROISHI FUMITAKA, ISHIMOTO TATSUYA, TOKUMIYA TAKAHIRO
• Format: Patent
• Language: English; Japanese
• Published: 16.11.2017
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide an X-ray inspection device with which it is possible to obtain a wide-field image and a high-definition image of a test object at the same time by one time of photographing and specify an appropriate inspection position of the test object by few times of photographing.SOLUTION: The X-ray inspection device comprises a stage 2 on which a test object S is placed, an X-ray source 3 for irradiating the test object S with X-rays, and a plurality of X-ray detectors 4, 5 for detecting X-rays having passed through the test object S. The plurality of X-ray detectors 4, 5 are arranged side by side in the periphery of positions facing the X-ray source 3 across the stage 2, with the respective inspection surfaces 4a, 5a arranged aslant to the axial direction of X-rays radiated from the X-ray source 3, and images of the test object S at an inspection position are imaged simultaneously with different fields of vision using at least one X-ray detector 4 and the other X-ray detector 5 out of the plurality of X-ray detectors 4, 5.SELECTED DRAWING: Figure 1 【課題】１度の撮影で被検査物の広視野な画像と高精細な画像とを同時に得ることができ、少ない撮影で被検査物の最適な検査位置を特定することが可能なＸ線検査装置を提供する。【解決手段】被検査物Ｓが載置されるステージ２と、被検査物Ｓに対してＸ線を照射するＸ線源３と、被検査物Ｓを透過したＸ線を検出する複数のＸ線検出器４，５と、複数のＸ線検出器４，５は、ステージ２を挟んでＸ線源３と対向する位置の周辺に並んで配置されると共に、それぞれの検出面４ａ，５ａがＸ線源３から照射されるＸ線の軸線方向に対して斜めに配置され、複数のＸ線検出器４，５のうち少なくとも一のＸ線検出器４と他のＸ線検出器５とを用いて、被検査物Ｓの検査位置における画像を異なる視野で同時に撮像する。【選択図】図１