ELECTROMECHANICAL CONVERSION ELEMENT AND METHOD FOR MANUFACTURING THE SAME, LIQUID DISCHARGE HEAD INCLUDING ELECTROMECHANICAL CONVERSION ELEMENT, AND LIQUID DISCHARGE DEVICE

• Main Authors: MACHIDA OSAMU, TAKEUCHI JUN, ISHIMORI MASAHIRO, ABE SHUYA, SHIMOFUKU HIKARI, HIRABAYASHI TAKUMA
• Format: Patent
• Language: English; Japanese
• Published: 02.11.2017
• Subjects: CORRECTION OF TYPOGRAPHICAL ERRORS; ELECTRICITY; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; PERFORMING OPERATIONS; PRINTING; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS

PROBLEM TO BE SOLVED: To manufacture an electromechanical conversion element including a wide diaphragm by using a ferroelectric film that is formed by an ink jet system and has a controlled film thickness distribution.SOLUTION: An electromechanical conversion element 10 is manufactured by a method including: a step (I) of forming a first electrode on a substrate 11; a step (II) of forming a PZT film 14 on a lower electrode 12; and a step (III) of forming an upper electrode 13 on the PZT film 14. The electromechanical conversion element 10 comprises: the lower electrode 12 formed on the substrate 11; the PZT film 14 formed on the lower electrode 12; and the upper electrode 13 on the PZT film 14, and the PZT film 14 is configured to be formed with concentric annular patterns having an interval therebetween.SELECTED DRAWING: Figure 10 【課題】インクジェット方式で形成され、膜厚分布が制御された強誘電体膜を用いて幅の広いダイヤフラムを持つ電気−機械変換素子を製造する。【解決手段】電気−機械変換素子１０は基板１１上に第一の電極を形成する工程（Ｉ）と、下部電極１２上にＰＺＴ膜１４を形成する工程（II）と、ＰＺＴ膜１４上に上部電極１３を形成する工程（III）を含んで製造される。電気−機械変換素子１０は基板１１上に形成された下部電極１２と、下部電極１２上に形成されたＰＺＴ膜１４と、ＰＺＴ膜１４上に上部電極１３を有し、ＰＺＴ膜１４は互いに間隔を空けた同心の環状パターンで形成されるよう構成した。【選択図】図１０