HOLDING DEVICE, MEASUREMENT DEVICE AND PRODUCT MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a holding device that is advantageous in terms of reproducibility of a location of an object to be held.SOLUTION: A holding device, which holds an optical element 22, comprises: a positioning unit 51 that positions a first lateral surface 221 and second lateral surfa...

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Bibliographic Details
Main Author KOIKE KANA
Format Patent
LanguageEnglish
Japanese
Published 02.11.2017
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Summary:PROBLEM TO BE SOLVED: To provide a holding device that is advantageous in terms of reproducibility of a location of an object to be held.SOLUTION: A holding device, which holds an optical element 22, comprises: a positioning unit 51 that positions a first lateral surface 221 and second lateral surface 222 adjacent to each other of the optical element 22; a first elastic part 52a that is positioned by the positioning unit 51 and applies urging force a third lateral surface of the optical element 22 opposing the first lateral surface 221; and a second elastic part 52b that is positioned by the positioning unit 51 and applies urging force a fourth lateral surface of the optical element 22 opposing the second lateral surface 222, in which the first elastic part 52a and the second elastic part 52b are configured so that a difference in an amount of line expansion between the first elastic part 52a and the optical element 22, and a difference in an amount of line expansion between the second elastic part 52b and the optical element 22 are both equal to or less than a threshold.SELECTED DRAWING: Figure 3 【課題】保持される物体の位置の再現性の点で有利な保持装置を提供する。【解決手段】光学素子22を保持する保持装置であって、光学素子22の互いに隣接する第1側面221および第2側面222を位置決めする位置決め部51と、位置決め部51に支持され、第1側面221に対向する光学素子22の第3側面に付勢力を加える第1弾性部52aと、位置決め部51に支持され、第2側面222に対向する光学素子22の第4側面に付勢力を加える第2弾性部52bと、第1弾性部52aと光学素子22との間の線膨張量の差と、第2弾性部52bと光学素子22との間の線膨張量の差とが、ともに閾値以下になるように、第1弾性部52aと第2弾性部52bとが構成されている。【選択図】図3
Bibliography:Application Number: JP20160088224