PROBE CARD

• Main Authors: NISHIMOTO TETSURO, NAKAJIMA MIKI
• Format: Patent
• Language: English; Japanese
• Published: 02.11.2017
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

PROBLEM TO BE SOLVED: To provide a probe card for use in low-temperature testing of light receiving elements.SOLUTION: A probe card for use in low-temperature testing of a test object 3 is equipped with a lower space 10D to which dry gas is supplied, a wiring board 20 that partitions an upper space 10U the pressure in which is lower than that in the lower space 10D, a contact probe 21 in contact with the test object 3 in the lower space 10D and a light-transmitting window 20W that transmits testing light to irradiate the test object 3 from the upper space 10U. The light-transmitting window 20W is arranged closer to the upper space 10U than the wiring board 20 to form a concave 203 on the wiring board 20 opposing the test object 3, and the concave 203 has an exhaust hole 23H through which gas resident in the concave 203 is discharged into the upper space 10U.SELECTED DRAWING: Figure 5 【課題】 受光素子の低温検査用のプローブカードを提供することを目的とする。【解決手段】 検査対象物３の低温検査用のプローブカードであって、乾燥気体が供給される下部空間１０Ｄと、下部空間１０Ｄよりも低圧の上部空間１０Ｕを仕切る配線基板２０と、下部空間１０Ｄ内の検査対象物３に接触するコンタクトプローブ２１と、上部空間１０Ｕから検査対象物３に照射される検査光を透過する透光窓２０Ｗとを備え、透光窓２０Ｗが、配線基板２０よりも上部空間１０Ｕ側に配置され、検査対象物３に対向する配線基板２０上の凹部２０３を形成し、凹部２０３が、凹部２０３内の滞留気体を上部空間１０Ｕに排出する排気孔２３Ｈを有する。【選択図】 図５