MEMS DEVICE, LIQUID INJECTION HEAD, AND LIQUID INJECTION DEVICE

• Main Authors: HIRAI EIKI, NISHIOMOTE MUNEHIDE, NAKAYAMA MASAO
• Format: Patent
• Language: English; Japanese
• Published: 02.11.2017
• Subjects: CORRECTION OF TYPOGRAPHICAL ERRORS; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; PERFORMING OPERATIONS; PRINTING; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS

PROBLEM TO BE SOLVED: To provide an MEMS device in which damage of a dielectric layer such as a piezoelectric layer and an electrode layer laminated thereon is suppressed, and a liquid injection head and a liquid injection device.SOLUTION: An actuator unit 14 comprises: a first substrate 29 laminated with a first electrode layer 37, a dielectric layer 38 and a second electrode layer 39 in this order in a drive region 35; and a second substrate 33 in which the dielectric layer 38 of the first substrate 29 is disposed so as to face a surface laminated. The first electrode layer 37 and the dielectric layer 38 are extended up to an outside than the second electrode layer 39 toward a non-drive region 36 deviated from the drive region 35. First resin 41 having elasticity is formed in a region including an end of the second electrode layer 39 in an extension direction of the dielectric layer 38. The first substrate 29 and the second substrate 33 are fixed by adhesive 48 in a state of the elastically deformed first resin 41 being interposed therebetween.SELECTED DRAWING: Figure 3 【課題】圧電体層等の誘電体層やこれに積層された電極層の損傷が抑制されたＭＥＭＳデバイス、液体噴射ヘッド、及び、液体噴射装置を提供する。【解決手段】アクチュエータユニット１４は、駆動領域３５に第１の電極層３７、誘電体層３８、及び第２の電極層３９がこの順に積層された第１の基板２９と、第１の基板２９の誘電体層３８が積層された面に対向して配置された第２の基板３３と、を備えている。第１の電極層３７及び誘電体層３８は、駆動領域３５から外れた非駆動領域３６に向けて第２の電極層３９よりも外側まで延在され、弾性を有する第１の樹脂４１が、誘電体層３８の延在方向における第２の電極層３９の端を含む領域に形成され、第１の基板２９と第２の基板３３とは、弾性変形した第１の樹脂４１を間に挟んだ状態で、接着剤４８により固定されている。【選択図】図３