METHOD FOR MANUFACTURING GLASS-WORK SUBSTRATE, GLASS-WORK SUBSTRATE, MASK BLANKS AND IMPRINT MOLD

• Main Authors: NAKAMURA HIROTO, UEKI SHINJI
• Format: Patent
• Language: English; Japanese
• Published: 26.10.2017
• Subjects: AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING; BASIC ELECTRIC ELEMENTS; CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS; CHEMISTRY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GLASS; JOINING GLASS TO GLASS OR OTHER MATERIALS; METALLURGY; MINERAL OR SLAG WOOL; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR; SHAPING OR JOINING OF PLASTICS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS; SURFACE TREATMENT OF GLASS; TRANSPORTING; WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

PROBLEM TO BE SOLVED: To provide a method for manufacturing a glass-work substrate, which is hard to cause an abnormal deformation in an imprint mold during vacuum suction, and which is difficult for cullet to remain.SOLUTION: A method for manufacturing a glass-work substrate for an imprint mold comprises the steps of: (1) preparing a glass plate having first and second main surfaces opposed to each other; (2) forming, in the second main surface of the glass plate, a concave portion having a bottom face and a side wall surrounding the bottom face; (3) providing a first protection layer in a region in the first main surface of the glass plate, where a mesa is to be formed later, which is to be executed before or after the step (2); and (4) immersing the glass plate in an etching liquid with a second protection layer provided on the second main surface of the glass plate to etch the glass plate.SELECTED DRAWING: Figure 6 【課題】真空吸着の際にインプリントモールドに異常変形が生じ難く、さらにガラス屑が残留し難いガラス加工基板の製造方法。【解決手段】インプリントモールド用のガラス加工基板の製造方法は、（１）相互に対向する第１および第２の主表面を有するガラス板を準備する工程と、（２）前記ガラス板の前記第２の主表面に、底面および該底面を取り囲む側壁を有する凹部を形成する工程と、（３）前記（２）の工程の前、または前記（２）の工程の後に実施される、前記ガラス板の前記第１の主表面の、後にメサが形成される領域に、第１の保護層を設置する工程と、（４）前記ガラス板の前記第２の主表面に第２の保護層が設置された状態で、前記ガラス板をエッチング溶液に浸漬させ、前記ガラス板をエッチングする工程と、を有する。【選択図】図６