SOLID-STATE LASER AND INSPECTION SYSTEM USING 193-NM LASER
PROBLEM TO BE SOLVED: To provide improved laser systems and associated techniques.SOLUTION: The systems and techniques generate an ultra-violet (UV) wavelength of approximately 193.368 nm from a fundamental vacuum wavelength near 1064 nm. Preferred embodiments separate out (102, 102') an uncons...
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Main Authors | , , , |
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Format | Patent |
Language | English Japanese |
Published |
19.10.2017
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Subjects | |
Online Access | Get full text |
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