RARE EARTH ELEMENT CERIUM COMPOSITE OXIDE PARTICLE AND MANUFACTURING METHOD THEREFOR AND POLISHING COMPOSITION
PROBLEM TO BE SOLVED: To provide a polishing slurry capable of polishing a silicone polished film at high speed.SOLUTION: A rare earth element cerium composite oxide particle satisfies 3.8≤A/B<5, where A is area strength of a (111) surface and B is area strength of a (200) surface in an X ray dif...
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12.10.2017
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Abstract | PROBLEM TO BE SOLVED: To provide a polishing slurry capable of polishing a silicone polished film at high speed.SOLUTION: A rare earth element cerium composite oxide particle satisfies 3.8≤A/B<5, where A is area strength of a (111) surface and B is area strength of a (200) surface in an X ray diffraction (XRD) with a Cu-k α ray source. The manufacturing method of oxide particles can manufacture the rare earth element cerium composite oxide particle satisfies 3.8≤A/B<5, where A is area strength of the (111) surface and B is area strength of the (200) surface in an X ray diffraction (XRD) with a Cu-k α ray source by heating a composition containing a salt containing a rare earth element and water at 100°C or less.SELECTED DRAWING: Figure 1
【課題】高速でシリコン研磨膜を研磨できる研摩用スラリーを提供する。【解決手段】本発明に係る希土類元素セリウム複合酸化物粒子は、Cu−kα線源でのX線回折(XRD)において、(111)面の面積強度をA、(200)面の面積強度をB、とした場合、3.8≦A/B<5を満たすことができる。また、本発明に係る酸化物粒子の製造方法は、Cu−kα線源でのX線回折(XRD)において、(111)面の面積強度をA、(200)面の面積強度をB、とした場合、3.8≦A/B<5を満たす希土類元素酸化物粒子を、希土類元素を含有する塩と、水と、を含有する組成物を100℃以下で加熱することにより製造することができる。【選択図】図1 |
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AbstractList | PROBLEM TO BE SOLVED: To provide a polishing slurry capable of polishing a silicone polished film at high speed.SOLUTION: A rare earth element cerium composite oxide particle satisfies 3.8≤A/B<5, where A is area strength of a (111) surface and B is area strength of a (200) surface in an X ray diffraction (XRD) with a Cu-k α ray source. The manufacturing method of oxide particles can manufacture the rare earth element cerium composite oxide particle satisfies 3.8≤A/B<5, where A is area strength of the (111) surface and B is area strength of the (200) surface in an X ray diffraction (XRD) with a Cu-k α ray source by heating a composition containing a salt containing a rare earth element and water at 100°C or less.SELECTED DRAWING: Figure 1
【課題】高速でシリコン研磨膜を研磨できる研摩用スラリーを提供する。【解決手段】本発明に係る希土類元素セリウム複合酸化物粒子は、Cu−kα線源でのX線回折(XRD)において、(111)面の面積強度をA、(200)面の面積強度をB、とした場合、3.8≦A/B<5を満たすことができる。また、本発明に係る酸化物粒子の製造方法は、Cu−kα線源でのX線回折(XRD)において、(111)面の面積強度をA、(200)面の面積強度をB、とした場合、3.8≦A/B<5を満たす希土類元素酸化物粒子を、希土類元素を含有する塩と、水と、を含有する組成物を100℃以下で加熱することにより製造することができる。【選択図】図1 |
Author | WANG PENGYU KAWAMOTO TATSUYOSHI NISHIMOTO KAZUO YAMANAKA TATSUYA |
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DocumentTitleAlternate | 希土類元素セリウム複合酸化物粒子とその製造方法、および研摩用組成物 |
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Snippet | PROBLEM TO BE SOLVED: To provide a polishing slurry capable of polishing a silicone polished film at high speed.SOLUTION: A rare earth element cerium composite... |
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SubjectTerms | ADHESIVES BASIC ELECTRIC ELEMENTS CHEMISTRY COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM,CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THERARE-EARTH METALS DRESSING OR CONDITIONING OF ABRADING SURFACES DYES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING INORGANIC CHEMISTRY MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS PAINTS PERFORMING OPERATIONS POLISHES POLISHING POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH SEMICONDUCTOR DEVICES SKI WAXES TRANSPORTING |
Title | RARE EARTH ELEMENT CERIUM COMPOSITE OXIDE PARTICLE AND MANUFACTURING METHOD THEREFOR AND POLISHING COMPOSITION |
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