RARE EARTH ELEMENT CERIUM COMPOSITE OXIDE PARTICLE AND MANUFACTURING METHOD THEREFOR AND POLISHING COMPOSITION

• Main Authors: WANG PENGYU, KAWAMOTO TATSUYOSHI, NISHIMOTO KAZUO, YAMANAKA TATSUYA
• Format: Patent
• Language: English; Japanese
• Published: 12.10.2017
• Subjects: ADHESIVES; BASIC ELECTRIC ELEMENTS; CHEMISTRY; COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM,CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THERARE-EARTH METALS; DRESSING OR CONDITIONING OF ABRADING SURFACES; DYES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; INORGANIC CHEMISTRY; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE; METALLURGY; MISCELLANEOUS APPLICATIONS OF MATERIALS; MISCELLANEOUS COMPOSITIONS; NATURAL RESINS; PAINTS; PERFORMING OPERATIONS; POLISHES; POLISHING; POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH; SEMICONDUCTOR DEVICES; SKI WAXES; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a polishing slurry capable of polishing a silicone polished film at high speed.SOLUTION: A rare earth element cerium composite oxide particle satisfies 3.8≤A/B<5, where A is area strength of a (111) surface and B is area strength of a (200) surface in an X ray diffraction (XRD) with a Cu-k α ray source. The manufacturing method of oxide particles can manufacture the rare earth element cerium composite oxide particle satisfies 3.8≤A/B<5, where A is area strength of the (111) surface and B is area strength of the (200) surface in an X ray diffraction (XRD) with a Cu-k α ray source by heating a composition containing a salt containing a rare earth element and water at 100°C or less.SELECTED DRAWING: Figure 1 【課題】高速でシリコン研磨膜を研磨できる研摩用スラリーを提供する。【解決手段】本発明に係る希土類元素セリウム複合酸化物粒子は、Ｃｕ−ｋα線源でのＸ線回折（ＸＲＤ）において、（１１１）面の面積強度をＡ、（２００）面の面積強度をＢ、とした場合、３．８≦Ａ／Ｂ＜５を満たすことができる。また、本発明に係る酸化物粒子の製造方法は、Ｃｕ−ｋα線源でのＸ線回折（ＸＲＤ）において、（１１１）面の面積強度をＡ、（２００）面の面積強度をＢ、とした場合、３．８≦Ａ／Ｂ＜５を満たす希土類元素酸化物粒子を、希土類元素を含有する塩と、水と、を含有する組成物を１００℃以下で加熱することにより製造することができる。【選択図】図１