PROCESSING DEVICE, DEVICE MANAGEMENT CONTROLLER, AND PROGRAM

• Main Authors: IWAKURA HIROYUKI, HAYASHIBARA HIDEMOTO, YASHIKI KAYOKO, MIYATA YUKIO, ASAI KAZUHIDE, FUJIMOTO KENICHI, KAJI RYUICHI, KAWAGISHI TAKAYUKI, YAMAMOTO KAZUYOSHI, OKUNO MASANORI
• Format: Patent
• Language: English; Japanese
• Published: 05.10.2017
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To easily grasp whether or not a processing device is stably operable.SOLUTION: The processing device comprises at least: a component management control part for monitoring a state of a component configuring the device; a device state monitoring control part for monitoring the soundness of device data obtained from the operation state of the component configuring the device; and a data matching control part for monitoring facility data provided from a factory facility to the device. Information evaluating the operation state of the device is derived on the basis of a plurality of monitoring result data selected from a group consisting of maintenance period monitoring result data obtained by the component management control part, the device state monitoring result data obtained by the device state monitoring control part and utility monitoring result data obtained by the data matching control part.SELECTED DRAWING: Figure 8 【課題】処理装置が安定して稼働できるか容易に把握する。【解決手段】装置を構成する構成部品の状態を監視する部品管理制御部と、装置を構成する構成部品の作動状態から得られる装置データの健全性を監視する装置状態監視制御部と、工場設備から装置に提供される設備データを監視するデータ整合制御部と、を少なくとも有し、部品管理制御部で取得される保守時期監視結果データと装置状態監視制御部で取得される装置状態監視結果データとデータ整合制御部で取得される用力監視結果データよりなる群から選択される複数の監視結果データに基づき、装置の運用状態を評価した情報を導出する構成が提供される。【選択図】図８