FOREIGN MATTER DETECTION DEVICE AND FOREIGN MATTER DETECTION METHOD

• Main Author: MIYAZAKI ITARU
• Format: Patent
• Language: English; Japanese
• Published: 05.10.2017
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a foreign matter detection device capable of accurately performing foreign matter detection for an object to be inspected having a shape whose thickness changes along a passing through direction.SOLUTION: A foreign matter detection device 20 includes: a plurality of X-ray sensors 31to 31of a photon detection type for outputting a pulse signal having a crest wave value corresponding to photon energy every time the photon of the X-ray is inputted; thickness detection means 60 for successively detecting a thickness in the X-ray transmission direction of an object W to be inspected before entering a position irradiated by the X-ray emitted by an X-ray generation part 22; and X-ray amount variable means 70 for changing an amount of the X-ray emitted by the X-ray generation part 22 for each predetermined period.SELECTED DRAWING: Figure 1 【課題】厚さが通過方向に沿って変化するような形状である被検査物に対する異物検出を精度よく行うことができる異物検出装置を提供する。【解決手段】異物検出装置２０は、Ｘ線の光子が入力される毎に光子のエネルギーに対応した波高値のパルス信号を出力する光子検出型の複数のＸ線センサ３１１〜３１Ｎと、Ｘ線発生部２２が出射するＸ線に照射される位置に進入する前の被検査物ＷのＸ線透過方向の厚さを逐次検出する厚さ検出手段６０と、検出された被検査物Ｗの厚さに基づいて、Ｘ線発生部２２が出射するＸ線の線量を所定期間毎に変更するＸ線線量可変手段７０とを有している。【選択図】図１