SPHERICAL EUCRYPTITE PARTICLE AND MANUFACTURING METHOD THEREFOR

• Main Authors: MATSUMOTO TADASHI, YAGI KATSUMASA, TANAKA MUTSUTO, TOKUDA NAOZO, SATO YUTAKA, AE MASANORI
• Format: Patent
• Language: English; Japanese
• Published: 05.10.2017
• Subjects: CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS; CHEMISTRY; GLASS; JOINING GLASS TO GLASS OR OTHER MATERIALS; MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES; METALLURGY; MINERAL OR SLAG WOOL; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS; SURFACE TREATMENT OF GLASS

PROBLEM TO BE SOLVED: To provide a spherical eucryptite particle higher in circularity than conventional ones, having large negative thermal expansion rate and high thermal conductivity and having high flowability, high dispersibility and high filling property and applicable to a semiconductor field, and a manufacturing method therefor.SOLUTION: There is provided a manufacturing method of a spherical eucryptite particle for obtaining a spherical particle containing an eucryptite crystal phase of 89% or more by a heat treatment of a spherical particle by spray coating a raw material powder containing 45 to 55 mol% of SiO, 20 to 30 mol% of AlOand 20 to 30 mol% of LiO at 600 to 1100°C and the spherical eucryptite particle obtained by the method.SELECTED DRAWING: None 【課題】従来よりも円形度が高く、且つ大きな負の熱膨張率および高熱伝導率を有し、高流動性、高分散性、高充填性を有する、半導体分野にも適用可能な、球状ユークリプタイト粒子およびその製造方法を提供すること。【解決手段】４５〜５５ｍｏｌ％のＳｉＯ２、２０〜３０ｍｏｌ％のＡｌ２Ｏ３、２０〜３０ｍｏｌ％のＬｉ２Ｏを含む原料粉末を溶射した球状粒子を、６００〜１１００℃で熱処理し、ユークリプタイト結晶相を８９％以上含む球状粒子を得ることを特徴とする、球状ユークリプタイト粒子の製造方法、およびその方法により得られる球状ユークリプタイト粒子。【選択図】なし