THIN FILM DEPOSITION SYSTEM
PROBLEM TO BE SOLVED: To provide a thin film deposition device with low cost and high mass productivity.SOLUTION: A rotation device 21 composed of a turntable is arranged inside a deposition chamber 11, after aligning deposition objects 5a and 5b on an alignment place 16, the deposition objects 5a a...
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Main Authors | , , , , |
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Format | Patent |
Language | English Japanese |
Published |
28.09.2017
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Subjects | |
Online Access | Get full text |
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