FOREIGN SUBSTANCE DETECTION DEVICE AND FOREIGN SUBSTANCE DETECTION METHOD

• Main Author: MIYAZAKI ITARU
• Format: Patent
• Language: English; Japanese
• Published: 14.09.2017
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To detect a foreign substance more accurately with a smaller structure using a plurality of X-ray sensors arranged in a line so as to intersect a direction where a test subject passes.SOLUTION: X rays emitted from an X-ray generator 22 to the passage of a test subject W are received by a plurality of X-ray sensors 31to 31of a photon detection type. The X-ray sensors 31to 31are arranged in one line so as to intersect a direction where the test subject W passes and every time the X-ray photon is input, output a pulse signal of a peak value corresponding to the photon energy. Transmission image data generating means 40 determines which one of sectioned regions the peak value of the pulse signal output from the X-ray sensors 31to 31in a predetermined period enters, accumulates the number of pulse signals input in the predetermined period for each region, and generates a plurality of pieces of transmission image data with the different X-ray transmission energy using the accumulation result. Determining means 50 determines whether there is a foreign substance on the test subject W by performing predetermined image processing on the obtained plurality of pieces of transmission image data.SELECTED DRAWING: Figure 1 【課題】被検査物の通過方向に交差するように一列に並んだ複数のＸ線センサを用いて、異物の検出をより高い精度で行ない、小型に構成できるようにする。【解決手段】Ｘ線発生部２２から被検査物Ｗの通過路に出射されたＸ線を、被検査物Ｗの通過方向に交差するように一列に並び、Ｘ線の光子が入力される毎にその光子のエネルギーに対応した波高値のパルス信号を出力する光子検出型の複数のＸ線センサ３１１〜３１Ｎで受ける。透過画像データ生成手段４０は、各Ｘ線センサ３１１〜３１Ｎから所定期間内に出力されるパルス信号の波高値が、複数に区分けした領域のいずれに入るかを判定し、所定期間内のパルス信号入力数を領域毎に累積し、その累積結果を用いてＸ線透過エネルギーが異なる複数の透過画像データを生成する。判定手段５０は、得られた複数の透過画像データに対して所定の画像処理を行なうことで被検査物Ｗの異物の有無を判定する。【選択図】図１