PURIFICATION METHOD OF FLUORINE COMPOUND GAS

• Main Authors: ETO JUN, YAO AKIFUMI, OYA KOHEI, TAKEDA YUTA
• Format: Patent
• Language: English; Japanese
• Published: 17.08.2017
• Subjects: CHEMISTRY; COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F; COMPOUNDS THEREOF; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS

PROBLEM TO BE SOLVED: To provide a purification method for removing a trace quantity of metal component contained in a fluorine compound gas.SOLUTION: A purification method for removing a metal component from a fluorine compound gas containing hydrogen fluoride and the metal component, includes a removal process for bringing the fluorine compound gas into contact with a solid metal fluoride and making the solid metal fluoride to absorb the hydrogen fluoride and the metal component to remove them. The fluorine compound gas preferably contains at least one kind of fluorine compound selected from a group consisting of ClF, ClF, IF, IF, BrF, BrF, NF, WF, SiF, CF, SFand BFand the metal fluoride is preferably alkali metal fluoride or alkali earth metal fluoride.SELECTED DRAWING: Figure 1 【課題】本発明は、フッ素化合物ガスに含まれる微量金属成分を除去する精製方法を提供することを目的とする。【解決手段】フッ化水素および金属成分を含むフッ素化合物ガスから金属成分を除去する精製方法であって、前記フッ素化合物ガスを、固体の金属フッ化物に接触させ、フッ化水素および金属成分を前記金属フッ化物に吸着させて除去する除去工程を含むフッ素化合物ガスの精製方法を用いる。フッ素化合物ガスが、ＣｌＦ、ＣｌＦ３、ＩＦ５、ＩＦ７、ＢｒＦ３、ＢｒＦ５、ＮＦ３、ＷＦ６、ＳｉＦ４、ＣＦ４、ＳＦ６、ＢＦ３からなる群より選ばれる少なくとも一種のフッ素化合物を含むことが好ましく、金属フッ化物が、アルカリ金属フッ化物またはアルカリ土類金属フッ化物であることが好ましい。【選択図】図１